A new cyber-physical space can be realized by enhancing the sensitivity of individual sensors. In addition, energy harvesting (EH) technology is valuable for powering these sensors. The objective of this research is to develop ultra-sensitive, self-powered micro physical sensors. Conventionally, enhancing the sensitivity of miniaturized, low-power MEMS sensors has involved trade-offs, such as material modifications and dimensional increases, which can compromise other performance characteristics. We aim to address this issue with our innovative technology that integrates both high sensor sensitivity and EH capabilities.

After my graduate studies, I have been working on micro-electromechanical systems (MEMS) and integrated circuits (LSI) produced using micro/nanofabrication techniques. Recently, I developed the world’s first technology to integrate electrets (dielectrics that retain electric charge/polarization semi-permanently) into MEMS and LSI using semiconductor processes. This groundbreaking technology enables world-leading R&D, and the social implementation of ultra-sensitive and self-powered micro physical sensors, which is why I chose this research area.

The following three goals are set:
-Promote research in the unexplored area of integrating of MEMS, LSI, and electrets.
-Establish an interdisciplinary research center that integrates various fields of science and technology.
-Develop a next-generation IoT society that contributes to the achievement of the SDGs.

From FY2024 to FY2028, in addition to publishing papers and presenting at conferences, the following actions will be undertaken:
– Promote joint research across different fields and develop new joint research projects.
– Conduct promotional activities both in Japan and internationally.
– Establish a platform for creating a world leading interdisciplinary research center.

Society 5.0 (Super Smart society), which is a vision of the Japanese government, requires advanced cyber-physical systems and digital twins that seamlessly integrate and deepen the connection between cyber space (virtual world) and physical space (real world). The ultra-sensitive, self-powered micro physical sensors we are developing are crucial for transferring information from physical space to cyber space and can significantly contribute to the realization of this next-generation society.

Domestic and International universities: Alongside the mechanical, electrical, and electronic technologies of this research group, we can conduct research and development that includes the improvement of sensor performance and the utilization of sensed information by integrating with materials science, information technology, and other scientific and engineering disciplines. We also seek to develop new application technologies through collaboration with fields such as medicine, life sciences, sports, humanities, and economics.
Companies: We expect semiconductor-related companies for sensor development, and companies developing sensor applications.

To achieve the roadmap, the following actions should be undertaken.
– Early prototyping for demonstration, fostering industry-academia collaboration, and promoting start-ups.
– Building a core team that includes PhD students and researchers.
– Forming global partnerships for international R&D.
– Conducting outreach activities to disseminate technology and expand collaborations.